UPW_E

Ion exchange resins in ultrapure water manufacture

There has been a remarkable progress in the production technology of semiconductor industry, and the speed of development is still growing. In such production, a large amount of ultrapure water (UPW) is being used for washing or cleaning processes, and the requirement for water quality is getting much higher.
Mitsubishi Chemical has developed a series of UPW grade ion-exchange resins, which can achieve the highest level of water quality.

Process for UPW manufacture

Generally, UPW manufacturing process consists of multi-step, complicated systems. In primary process, a cation-exchnage resin and an anion-exchange resin are used for demineralization followed by a mixed-bed (MB) to remove ionic species from raw water. In sub-system (secondary process), high grade mixed resin is used to remove trace amount of impurities as a cartridge polisher.

	primary process				MB			CP
raw water	SKF		SAF		SMN			SMT	UPW

DIAION^(R) cation exchange resins for primary process

DIAION^(R) SKF110 is a newly developed cation-exchange resin for promary process, and shows excellent rinsing property with low TOC leakage. DIAION^(R) SKF110H is the regenerated form (H form) product of DIAION^® SKF110, and is ready to use.

Typical profiles of DIAION^® SKF110 & SKF110H

Product	DIAION^(R) SKF110	DIAION^(R) SKF110H
Structure	crosslinked polystyrene with sulfonic acidgroup
Appearence	gellular brownish spherical bead
Ionic form	Na	H
Appearance index (%)	> 95	> 95
Ion-exchange capacity (meq/mL)	> 2.0	> 1.9
Water content (%)	35~45	40~50
Particle size distribution > 1180 µm < 325 µm	< 5 % < 1 %
Effective size (mm)	> 0.4
Uniformity coefficient	< 1.6
(rinsing condition)	HCl = 200 g/L-R regeneration SV = 30, 3 hr	SV = 30, 3 hr
TOC (ppb)	< 100	< 50

DIAION^(R) anion exchange resins for primary process

Two series of anion-exchange resins are now available.
DIAION^(R) SAF12AL is a newly developed anion-exchange resin for promary process, and shows excellent rinsing property with low TOC leakage. DIAION^(R) SAF1ALOH is the regenerated form (OH form) product of DIAION^(R) SAF12ALOH, and is ready to use.
DIAION^(R) SAF10DL and DIAION^(R) WA30C are anion-exchange resins designed for dual-layer applicatoin.

Typica properties of DIAION^(R) SAF12A·SAF12AOH?SAF10DL·WA30C

Type	DIAION SAF12A	DIAION SAF12AOH	DIAION SAF10DL	DIAION WA30C
Structure	crosslinked polystyrenen with quaternary ammmonium group			crosslinked polystyrenen with tertiary amine group
Appearance	gellular yellowish spherical bead			white opaque spherical bead
Ionic form	Cl	OH	Cl	free base
Appearance index (%)	> 90	> 90	> 90	> 95
Ion-exchange capacity (meq/mL)	> 1.3	> 0.9	> 1.3	> 1.5
Water content (%)	48~55	62~72	38~43	43~55
Particle size distribution > 1180 µm < 420 µm < 300 µm	< 5 % -- < 1 %	< 5 % -- < 1 %	< 5 % < 5 % --	< 5 % -- < 1 %
Effective size (mm)	> 0.4	> 0.4	> 0.5	> 0.4
Uniformity coefficient	< 1.6	< 1.6	< 1.6	< 1.6
(rinsing condition)	SV = 30 3 hr	NaOH = 200 g/L-R SV = 30, 3 hr	NaOH = 200 g/L-R SV=30, 3 hr	SV = 30 3 hr
TOC (ppb)	< 100	< 50	< 200	< 50

Ion-exchange resins for mixed-bed application

Cation-exchange resin and anion-exchange resin as well as premixed resins are available for mixed-bed application.
DIAION^(R) PKF228LH is a porous, highly crosslinked resin with lowered TOC leakage designed for mixed-bed applications, and DIAION^(R) SANUP is a gel type anion-exchange resin with with lowered TOC. For premixed resins, please call your local agent.

Typical properties of DIAION^® PKF228LH & SANUP resins

Type	DIAION^(R) PKF228LH	DIAION^(R) SANUP
Structure	crosslinked polystyrene with sulfonic acid group	crosslinked polystyrene with quaternary ammonium group
Appearance	brownish spherical bead	gellular yellowish spherical bead
Ionic form	H	OH
Appearance index (%)	> 95	> 90
Ion-exchange capacity (meq/mL)	> 1.9	> 0.9
Water content (%)	39~49	62~72
Particle size distribution > 1180 µm < 420 µm < 300 µm	< 5 % < 5 % --	< 5 % -- < 1 %
Effective size (mm)	> 0.4	> 0.4
Uniformitiy coeffiecient	< 1.6	< 1.6
(rinsing condition)	SV = 30, 3 hr
TOC (ppb)	< 50

Cartridge polisher resins

CP application requires the highes grades of UPW resins. DIAION^(R) SKT10, SAT10 and SMT100 are newly developed, low leachable resins for CP applications.

Typical properties of DIAION^(R) SKT10, SAT10L & SMT100 resins

Type	DIAION SKT10L	DIAION SAT10L	DIAION SMT100L
Structure	crosslinked polystyrene with sulfonic acid group	crosslinked polystyrene with quaternary ammonium group	mixture of SKT10 and SAT10
Appearance	geluular brownish spherical bead	gellular yellowish spherical bead	--
Ionic form	H	OH	H / OH
Appearance index (%)	> 95 Na< 0.034	> 90 Cl< 0.30
Ion-exchange capacity (meq/mL)	> 1.9	> 0.9
Water content (%)	40~50	62~72
Particle size distribution > 1180 µm < 420 µm < 300 µm	< 5 % < 1 %	< 5 % -- < 5 %
Effective size (mm)	> 0.4	> 0.4
Uniformitiy coeffiecient	< 1.6	< 1.6
(rinsing conditions)
resistivity (MW·cm	> 12	> 15	> 18
TOC (ppb)	< 50	< 50	< 10
Na (ppt)	< 0.5	< 0.5	ND
Cl (ppt)	< 0.5	< 0.5	ND